1.

Conference Proceedings
Conference Proceedings
1. WIDE BANDGAP FLUORINATED SILICON-CARBIDE-NITRIDE FILMS USING NP3
Goh, H.C. ; Tan, S.M. ; Naseem, H.A. ; Ang, S.S. ; Brown, W.D.
Pub. info.: Amorphous silicon technology 1991 : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.763-768,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 219
2.

Conference Proceedings
Conference Proceedings
2. Vortex via process: analysis and mask fabrication for contact CDs <80 nm
Levenson, M.D. ; Tan, S.M. ; Dai, G. ; Morikawa, Y. ; Hayashi, N. ; Ebihara, T.
Pub. info.: Optical Microlithography XVI.  Part One  pp.344-370,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040