1.

Conference Proceedings
Conference Proceedings
1. An Experimental Investigation of the Role of PEG, CI, and SPS during Copper Electrodeposition
Tan, M. ; Hutchins, J. ; Harb, J.N.
Pub. info.: Copper interconnects, new contact metallurgies, structures, and low-k interlevel dielectrics : proceedings of the internatioal symposium.  pp.15-21,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-22
2.

Conference Proceedings
Conference Proceedings
2. The Role of Chloride Ion in Copper Electrodeposition from Acidic Baths Containing Cl-, PEG, and SPS
Tan, M. ; Harb, J.N.
Pub. info.: Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium.  pp.94-98,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-10
3.

Conference Proceedings
Conference Proceedings
3. MAGNETIC PROPERTIES OF SPUTTERED Ni/Al MULTILAYERS
Tsang, E. ; Cates, J. C. ; Tan, M. ; Waknis, A. ; Alexander Jr., C. ; Parker, M. R. ; Barnard, J. A.
Pub. info.: Magnetic surfaces, thin films, and multilayers : symposium held April 29-May 2, 1991, Anaheim, California, U.S.A..  pp.379-384,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 231
4.

Conference Proceedings
Conference Proceedings
4. ELECTRICAL RESISTIVITY AND CRYSTAL STRUCTURE OF NICKEL-BASED MULTILAYER THIN FILMS
Tan, M. ; Haftek, E. ; Waknis, A. ; Barnard, J. A.
Pub. info.: Structure and properties of interfaces in materials : symposium held Decmber[i.e. December] 2-5, 1991, Boston, Massachusetts, U.S.A..  pp.695-700,  1992.  Pittsburgh.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 238
5.

Conference Proceedings
Conference Proceedings
5. MICROSTRUCTURAL EVOLUTION OF Ti/Ni AND Ni/Ti BILAYER THIN FILMS
Hafnek, E. ; Tan, M. ; Waknis, A. ; Barnard, J. A.
Pub. info.: Structure and properties of interfaces in materials : symposium held Decmber[i.e. December] 2-5, 1991, Boston, Massachusetts, U.S.A..  pp.701-706,  1992.  Pittsburgh.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 238
6.

Conference Proceedings
Conference Proceedings
6. THERMAL EVOLUTION OF MAGNETIC PROPERTIES AND CRYSTAL STRUCTURE IN COMPOSITIONALLY MODULATED Al/Ni THIN FILMS
Waknis, A. ; Haftek, E. ; Tan, M. ; Barnard, J. A. ; Tsang, E.
Pub. info.: Magnetic materials: microstructure and properties : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.171-176,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 232
7.

Conference Proceedings
Conference Proceedings
7. GIANT MAGNETORESISTANCE IN SINGLE LAYER AND MULTILAYER PHASE SEPARATING ALLOY FILMS
Hossain, S. ; Waknis, A. ; Seale, D. ; Tan, M. ; Parker, M. R. ; Barnard, J. A.
Pub. info.: Magnetic ultrathin films : multilayers and surfaces, interfaces and characterization : symposium held April 12-16, 1993, San Francisco, California, U.S.A..  pp.419-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 313
8.

Conference Proceedings
Conference Proceedings
8. A Comparison Study of MPSA-Cl-PEG and SPS-Cl-PEG Additive Systems for Copper Electrodeposition
Tan, M. ; Harb, J.N.
Pub. info.: Electrochemical processes in ULSI and MEMS : proceedings of the international symposium.  pp.34-40,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-17
9.

Conference Proceedings
Conference Proceedings
9. MICROSTRUCTURAL EVOLUTION OF Al/Ni AND Ni/Al BILAYER THIN FILMS
Barnard, J.A. ; Haftek, E. ; Waknis, A. ; Tan, M.
Pub. info.: Evolution of thin-film and surface microstructure : symposium held November 26-December 1, 1990, Boston, Massachusetts, U.S.A..  pp.685-690,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 202
10.

Conference Proceedings
Conference Proceedings
10. Influence of Film Thickness on Intrinsic Growth Stress and Raman Evaluation of Tetrahedral Amorphous Carbon Films
Zhu, J. ; Han, J. ; Meng, S. ; He, X. ; Tan, M. ; Gao, W.
Pub. info.: PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China.  pp.3627-3630,  2005.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 475-479(5)