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14 results

Conference Proceedings

1. Advanced 2D structures metrology with CD-SEM for OPC challenges

Kris, R. ; Tam, A. ; Peltinov, R. ; Menadeva, O. ; Adan, O. ; Wertsman, N. ; Vilenkin, A.

Pub. info.:	Advanced microlithography technologies : 8-10 November, 2004, Beijing, China. pp.130-141, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5645

Conference Proceedings

2. Verification of height and sidewall angle SEM metrology accuracy using Monte Carlo simulation

Kris, R. ; Adan, O. ; Tam, A. ; Karabekov, A. ; Menadeva, O. ; Peltinov, R. ; Zoran, O. ; Wertsman, N. ; Vilenkin, A.

Pub. info.:	Advanced microlithography technologies : 8-10 November, 2004, Beijing, China. pp.168-179, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5645

Conference Proceedings

3. A proof-of-concept optical tripwire detector

McFee, J.E. ; Achal, S.B. ; Ivanco, T.A. ; Tam, A. ; Baker, G. ; Anger, C.D.

Pub. info.:	Detection and remediation technologies for mines and minelike targets IX : 12-16 April 2004, Orlando, Florida, USA. pp.722-733, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5415

Technical Paper

4. A directionally-adaptive finite element method for high-speed flows

Ait-Ali-Yahia, D. ; Habashi, W.G. ; Tam, A. ; Vallet, M.-G. ; Fortin, M.

Pub. info.:	AIAA paper. pp.1-14, 1996. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit
Ser. no.:	1996

Technical Paper

5. A 3-D adaptive finite element method for turbomachinery

Tam, A. ; Habashi, W.G. ; Ait Ali Yahia, D. ; Robichaud, M.P. ; Sleiman, M. ; Vallet, M.-G.

Pub. info.:	AIAA paper. pp.1-13, 1996. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit
Ser. no.:	1996

Technical Paper

6. Turbomachinery multistage simulation by a finite element adaptive approach

Sleiman, M. ; Robichaud, M. P. ; Peeters, M. F. ; Tam, A. ; Habashi, W. G. ; Fortin, M.

Pub. info.:	A.S.M.E. paper. 1996. New York. The American Society of Mechanical Engineers
Title of ser.:	ASME Technical Paper : GT
Ser. no.:	1996

Technical Paper

7. A 3-D adaptive anisotropic method for external and internal flows

Tam, A. ; Robichaud, M.P. ; Tremblay, P. ; Habashi, W.G. ; Hohmeyer, M. ; Guevremont, G. ; Peeters, M.F. ; Germain, P.

Pub. info.:	AIAA paper. pp.1-13, 1998. American Institute of Aeronautics and Astronautics
Title of ser.:	AIAA Paper : Aerospace Sciences Meeting and Exhibit
Ser. no.:	1998

Conference Proceedings

8. Advanced edge roughness measurement application for mask metrology [5992-158]

Chase, D. ; Kriss, R. ; Katza, R. ; Tam, A. ; Gershtein, L. ; Falah, R. ; Wertsman, N.

Pub. info.:	25th Annual BACUS Symposium on Photomask Technology. pp.59924N-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5992

Conference Proceedings

9. Contact hole edge roughness: circles vs. stars

Habermas, A. ; Lu, Q. ; Chase-Colin, D. ; Har-Zvi, M. ; Tam, A. ; Sagi, O.

Pub. info.:	Metrology, Inspection, and Process Control for Microlithography XVIII. pp.337-345, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5375

10.

Conference Proceedings

10. Mask metrology 2D application for measurement of OPC features and corner roundness

Kris, R. ; Menadeva, O. ; Tam, A. ; Peltinov, R. ; Segal, L. ; Wertsman, N. ; Shcolnik, N. ; Gottlib, G. ; Vilenkin, A.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology XI. pp.698-707, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5446

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Author: Tam, A.