1.

Conference Proceedings
Conference Proceedings
1. Modeling Analysis of SiC CVD in the Horizontal Hot Wall Reactors
Semennikov, A.K. ; Talalaev, R.A. ; Vorob'ev, A.N. ; Makarov, Yu.N.
Pub. info.: Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium.  pp.210-217,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-8
2.

Conference Proceedings
Conference Proceedings
2. Modelling of MOVPE Of Group III-Nitrides in Horizontal Tube Reactor
Galjukov, A.O. ; Egorov, Yu.E. ; Makarov, Yu.N. ; Talalaev, R.A. ; Kirchner, Ch. ; Kamp, M. ; Ebling, K.J.
Pub. info.: Proceedings of the Second Symposium on III-V Nitride Materials and Processes.  pp.244-252,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-34
3.

Conference Proceedings
Conference Proceedings
3. Detailed Modeling of Metal Organic Vapor Phase Epitaxy of III-V Ternary Compounds in Production-Scale AIX 2400G3
Yakovlev, E.V. ; Shpolyanskiy, Y.A. ; Talalaev, R.A. ; Karpov, S.Y. ; Makarov, Y.N. ; Bergunde, T. ; Lowry, S.A.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.292-299,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13