1.

Conference Proceedings
Conference Proceedings
1. Contrast enhancement by alkali decomposable additives in chemically amplified negative i-line resists
Uetani, Y. ; Moriuma, H. ; Hirai, Y. ; Takata, Y. ; Yamada, A.
Pub. info.: Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California.  pp.503-509,  1999.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3678
2.

Conference Proceedings
Conference Proceedings
2. Characterization of Oxide Films on SiC Epitaxial (0001) Faces by Angle-Resolved Photoemission Spectroscopy Measurements Using Synchrotron Radiation
Hijikata, Y. ; Yaguchi, H. ; Yoshida, S. ; Takata, Y. ; Kobayashi, K. ; Shin, S. ; Nohira, H. ; Hattori, T.
Pub. info.: Silicon carbide and related materials 2004 : ECSCRM 2004 : proceedings of the 5th European Conference on Silicon Carbide and Related Materials, August 31 - September 4 2004, Bologna, Italy.  pp.585-588,  2005.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 483-485
3.

Conference Proceedings
Conference Proceedings
3. Off-Angle Dependence of Characteristics of 4H-SiC-Oxide Interfaces
Hijikata, Y. ; Yaguchi, H. ; Yoshida, S. ; Takata, Y. ; Kobayashi, K. ; Nohira, H. ; Hattori T.
Pub. info.: Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005.  pp.1003-1006,  2006.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 527-529
4.

Technical Paper
Technical Paper
4. Numerical Simulation of Heat and Fluid Flow in a Basic Pulse- Tube Refrigerator.
Koshimizu, T. ; Takata, Y. ; Kubota, H. ; Ito, T.
Pub. info.: A.S.M.E. paper.  2004.  New York, NY.  American Society of Mechanical Engineers
Title of ser.: ASME Technical Paper : HT-FED
Ser. no.: 2004