1.

Conference Proceedings
Conference Proceedings
1. Fine/High Aspect Ratio of SiO2 Hole and Gap Etching
Horiike, Y. ; Ogata, M. ; Oshio, H. ; Chinzei, Y. ; Feurprier, Y. ; Takamura, Y. ; Ichiki, T.
Pub. info.: ULSI process integration : proceedings of the first international symposium.  pp.329-344,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-18
2.

Conference Proceedings
Conference Proceedings
2. F-Based Plasmas for the Etching of Pt
Feurprier, Y. ; Takamura, Y. ; Ichiki, T. ; Horilke, Y.
Pub. info.: Plasma etching processes for sub-quarter micron devices : proceedings of the international symposium.  pp.351-360,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-30
3.

Conference Proceedings
Conference Proceedings
3. Evaluation of DeSOx/DeNOx System for Flue Gas with Physical Adsorption
Saji, A. ; Takamura, Y. ; Noda, H. ; Ogisu, K. ; Yasutake, A. ; Izumil, J. ; Hironaka, S.
Pub. info.: AIChE ANNUAL MEETING - MARCH 8-12, 1998 - NEW ORLEANS, LA.  1998.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1998
4.

Conference Proceedings
Conference Proceedings
4. Peritectic Coupled Growth in Nd-Based Superconducting Oxides from Highly Undercooled Melt
Nagashio, K. ; Takamura, Y. ; Kuribayashi, K.
Pub. info.: Solidification and gravity 2000.  pp.197-202,  2000.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 329-330
5.

Conference Proceedings
Conference Proceedings
5. Containerless Solidification of Peritectic and Eutectic Ceramics using Aero-Acoustic Levitator
Nagashio, K. ; Takamura, Y. ; Kuribayashi, K.
Pub. info.: Solidification and gravity 2000.  pp.173-178,  2000.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 329-330