1.

Conference Proceedings
Conference Proceedings
1. CHEMICAL STRUCTURE OF NATIVE OXIDE GROWN ON HYDROGEN-TERMINATED SILICON SURFACES
Takakura, M. ; Yasaka, T. ; Miyazaki, S. ; Hirose, M.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.113-118,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
2.

Conference Proceedings
Conference Proceedings
2. CLEANING AND OXIDATION OF HEAVILY DOPED Si SURFACES
Yasaka, T. ; Uenaga, S. ; Yasutake, H. ; Takakura, M. ; Miyazaki, S. ; Hirose, M.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.385-390,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
3.

Conference Proceedings
Conference Proceedings
3. LAYER-BY-LAYER OXIDATION OF SILICON
Yasaka, T. ; Takakura, M. ; Miyasaki, S. ; Hirose, M.
Pub. info.: Atomic layer growth and processing : symposium held April 29 - May 1, 1991, Anaheim, California, U.S.A..  pp.225-232,  1991.  Pittsburgh.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 222
4.

Conference Proceedings
Conference Proceedings
4. STRUCTURAL AND ELECTRICAL CHARACTERIZATION OF ULTRA-THIN SiO2 GROWN ON HYDROGEN-TERMINATED SILICON SURFACES
Hirose, M. ; Yasaka, T. ; Hiroshima, M. ; Takakura, M. ; Miyazaki, S.
Pub. info.: Surface chemical cleaning and passivation for semiconductor processing.  pp.367-,  1993.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 315