1.

Conference Proceedings
Conference Proceedings
1. Micro materials processing with high-power diode lasers
Bachmann,F.G. ; Takahashi,R. ; Fujishima,S.
Pub. info.: First International Symposium on Laser Precision Microfabrication : 14-16 June 2000, Omiya, Saitama, Japan.  pp.220-223,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4088
2.

Conference Proceedings
Conference Proceedings
2. Control and uniformity of 280-nm features in i-line lithography using optical proximity corrections and off-axis illumination
Watson,G.P. ; Garofalo,J.G. ; Hansen,M. ; Grodnensky,I.M. ; Zych,L.J. ; Takahashi,R. ; Yarbrough,W.J. ; Ehrlacher,E. ; Reim,A. ; Vella,R.M. ; Dunbar,A. ; Colina,A. ; Herrero,B. ; Castro,D.
Pub. info.: Optical Microlithography X.  pp.374-383,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051
3.

Conference Proceedings
Conference Proceedings
3. Lithography tricks and tribulations
Garofalo,J.G. ; Watson,G.P. ; Trimble,L.E. ; Cirelli,R.A. ; Colina,A. ; Grodnensky,I.M. ; Herrero,B. ; Kunbar,A. ; Peiffer,F.R. ; Takahashi,R. ; Trascon-Auriol,R.G. ; Yarbrough,W.J. ; Zych,L.J.
Pub. info.: 16th Annual BACUS Symposium on Photomask Technology and Management.  pp.311-322,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2884