1.

Conference Proceedings
Conference Proceedings
1. TEM OBSERVATION OF THE DAMAGES IN HEAVILY ION-IMPLANTED FINE Si COLUMNS
Shingubara, S. ; Sukesako, H. ; Kawasaki, T. ; Inoue, K. ; Matusi, Y. ; Sakaue, H. ; Takahagi, T. ; Horiike, Y.
Pub. info.: Beam-solid interactions for materials synthesis and characterization : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A..  pp.641-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 354
2.

Conference Proceedings
Conference Proceedings
2. Cu Deposition Characteristics into Submicron Contact Holes Employing Self-Sputtering with a High Ionization Rate
Shingubara, S. ; Sano, A. ; Sakaue, H. ; Takahagi, T. ; Horiike, Y. ; Radzimski, Z. J. ; Posadowski, W. M.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.185-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427
3.

Conference Proceedings
Conference Proceedings
3. Electromigration Reliability Study of a GMR Spin Valve Device
Shingubara, S. ; Takeda, Y. ; Sakue, H. ; Takahagi, T. ; Verbruggen, A. H.
Pub. info.: Materials reliability in microelectronics IX : symposium held April 6-8, 1999, San Francisco, California, U.S.A..  pp.145-,  1999.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 563
4.

Conference Proceedings
Conference Proceedings
4. Formation of Al Nanodot Array by the Combination of Nano-Indentation and Anodic Oxidation
Shingubara, S. ; Murakami, Y. ; Morimoto, K. ; Sakaue, H. ; Takahagi, T.
Pub. info.: Nanopatterning : from ultralarge-scale integration to biotechnology : symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A..  pp.133-138,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 705
5.

Conference Proceedings
Conference Proceedings
5. Initial Stage of Titanium Silicide Formation on Si(111) Substrate
Shingubara, S. ; Takata, S. ; Takahashi, E. ; Konagata, S. ; Sakaue, H. ; Takahagi, T.
Pub. info.: Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA.  pp.137-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 402
6.

Conference Proceedings
Conference Proceedings
6. Void Elongation Phenomena Observed in Polycrystalline Cu Interconnects at High Current Density Stressing Conditions
Shingubara, S. ; Kajiwara, S. ; Osaka, T. ; Sakaue, H. ; Takahagi, T.
Pub. info.: Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A..  pp.229-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 473
7.

Conference Proceedings
Conference Proceedings
7. Aluminum nanodot array formed by anodic oxidation and its conduction properties (Invited Paper)
Shingubara, S. ; Murakami, Y. ; Sakaue, H. ; Takahagi, T.
Pub. info.: Quantum Sensing: Evolution and Revolution from Past to Future.  pp.387-395,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4999