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Zeolites and mesoporous materials at the dawn of the 21st century : proceedings of the 13th International Zeolite Conference, Montpellier, France, 8-13 July 2001. pp.256-256, 2001. Amsterdam. Elsevier
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Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium. pp.331-345, 2004. Pennington, N.J.. Electrochemical Society
Hata, N. ; Negoro, C. ; Takada, S. ; Yamada, K. ; Oku, Y. ; Kikkawa, T.
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Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A.. pp.191-196, 2003. Warrendale, Pa.. Materials Research Society
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Photomask and Next-Generation Lithography Mask Technology X. pp.1005-1013, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Sensors, Cameras, and Systems for Scientific/Industrial Applications VII. pp.60680A-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Kikkawa, T. ; Oku, Y. ; Kohmura, K. ; Fujii, N. ; Tanaka, H. ; Ishikawa, A. ; Matsuo, H. ; Sonoda, Y. ; Miyoshi, H. ; Goto, T. ; Hata, N. ; Seino, Y. ; Takada, S. ; Yoshino, T. ; Kinoshita, K.
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Nanofabrication: Technologies, Devices, and Applications. pp.153-157, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering