Micromachining technology for micro-optics and nano-optics IV : 23-25 January 2006, San Jose California, USA. pp.61100A-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Takada, K. ; Yamagishi, H. ; Minami, H. ; Imai, M.
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Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.376-395, 1998. Pennington, NJ. Electrochemical Society
Ando, H. ; Miyazaki, K. ; Takada, K. ; Toyoda, K. ; Maeno, K.
Pub. info.:
26th International Congress on High-Speed Photography and Photonics : 20-24 September 2004, Alexandria, Virginia, USA. pp.376-383, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering