1.

Conference Proceedings
Conference Proceedings
1. CD measurement in flash memory using substrate current technology
Y. Ko ; K. Yamada ; T. Ushiki
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
2.

Conference Proceedings
Conference Proceedings
2. Nanometer-scale manipulator and ultrasonic cutter using an atomic force microscope controlled by a haptic device
F. Iwata ; S. Kawanishi ; A. Sasaki ; H. Aoyama ; T. Ushiki
Pub. info.: Fifth International Symposium on Instrumentation Science and Technology.  2  pp.71334E-1-71334E-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7133