1.

Conference Proceedings
Conference Proceedings
1. Fabrication of Hole Resonant Tunneling Diodes with Nanometer Order Heterostructures of Si/Strained Si1-xGex Epitaxially Grown on Si(100)
M. Sakuraba ; R. Ito ; T. Seo ; J. Murota
Pub. info.: ULSI process integration 5.  pp.131-139,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(6)
2.

Conference Proceedings
Conference Proceedings
2. Room Temperature Superplastic Deformation of Closed-Cell Zinc Alloy Foams
K. Kitazono ; T. Seo ; Y. Takiguchi
Pub. info.: PRICM 6 : selected, peer reviewed papers from The sixth Pacific Rim International Conference on Advanced Materials and Processing, November 5-9, 2007, ICC Jeju, Jeju Island, Korea.  561-565  pp.1715-1718,  2007.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 561-565
3.

Conference Proceedings
Conference Proceedings
3. WNx Film Prepared by Atomic Layer Deposition using F-Free BTBMW and NH3 Plasma Radical for ULSI Applications
D. You ; S. Kim ; K. Lee ; S. Lee ; T. Seo
Pub. info.: Atomic layer deposition applications 2.  pp.147-152,  2007.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(15)
4.

Conference Proceedings
Conference Proceedings
4. Electrical Properties and Thermal Stabilities of HfZrOx by Atomic Layer Deposition Technique for ULSI Application
Y. Jung ; S. Lee ; K. Lee ; T. Seo
Pub. info.: Atomic layer deposition applications 2.  pp.99-105,  2007.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(15)