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Conference Proceedings

1. Usefulness and limitation of measurement methods for evaluation of tissue-engineered cartilage function and characterization using nanosecond pulsed laser

Progress in biomedical optics and imaging. vol.8, no.16

Pub. info.:	Optics in tissue engineering and regenerative medicine : 21 and 23 January 2007, San Jose, California, USA. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6439

Conference Proceedings

2. A New Solid Electrolyte Type Ammonia Gas Sensor Applying Praseodymium Ammonium Sulfate Based Auxiliary Sensing Electrode

T. Nagai ; S. Tamura ; N. Imanaka

Pub. info.:	Chemical Sensors 8 : chemical (gas, ion ,bio) sensors and analytical systems. pp.257-264, 2008. Pennington, NJ. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	16(11)

Conference Proceedings

3. Sulfur Dioxide Gas Sensor Based on Al3+ and O2- Ion Conducting Solid Electrolytes

S. Tamura ; T. Nagai ; Y. Inaba ; N. Imanaka

Pub. info.:	Chemical Sensors 8 : chemical (gas, ion ,bio) sensors and analytical systems. pp.309-315, 2008. Pennington, NJ. Electrochemical Society
Title of ser.:	ECS transactions
Ser. no.:	16(11)

Conference Proceedings

4. Diode-pumped solid state laser for spaceborne water vapor DIAL

O. Uchino ; T. Nagai ; T. Fujimoto ; C. Nagasawa ; M. Abo

Pub. info.:	Lidar techniques for remote sensing ll : 25-26 September 1995, Paris, France. pp.154-160, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2581

Conference Proceedings

5. Various factors of the image blur in chemically amplified resist

T. Kawakami ; T. Nagai ; Y. Nishimura ; M. Shima ; S. Kusumoto ; T. Shimokawa

Pub. info.:	Advances in resist materials and processing technology XXIV. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6519

Conference Proceedings

6. Analysis of diffraction orders including mask topography effects for OPC optimization

Y. Inazuki ; N. Toyama ; T. Adachi ; T. Nagai ; T. Suto ; Y. Morikawa ; H. Mohri ; N. Hayashi

Pub. info.:	Optical microlithography XX. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6520

Conference Proceedings

7. Pupil plane analysis on AIMS 45-193i for advanced photomasks

Y. Morikawa ; T. Sutou ; K. Mesuda ; T. Nagai ; Y. Inazuki ; T. Adachi ; N. Toyama ; H. Mohri ; N. Hayashi ; U. Stroessner ; R. Birkner ; R. Richter ; T. Scheruebl

Pub. info.:	Optical microlithography XX. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6520

Conference Proceedings

8. Extendibility of single mask exposure for practical ArF immersion lithography

T. Adachi ; Y. Inazuki ; T. Sutou ; T. Nagai ; N. Toyama ; Y. Morikawa ; H. Mohri ; N. Hayashi

Pub. info.:	Photomask and next-generation lithography mask technology XIV. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6607

Conference Proceedings

9. Approach to analyze decomposition impact for photomask fabrication

N. Toyama ; T. Adachi ; Y. Inazuki ; T. Sutou ; T. Nagai ; Y. Morikawa ; H. Mohri ; N. Hayashi

Pub. info.:	Photomask and next-generation lithography mask technology XIV. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6607

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Conference Proceedings

10. Characteristics optimization of mask materials for hyper-NA lithography

Y. Morikawa ; T. Suto ; T. Nagai ; Y. Inazuki ; T. Adachi ; Y. Kitahata ; T. Yokoyama ; N. Toyama ; H. Mohri ; N. Hayashi

Pub. info.:	EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6533

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Author: T. Nagai