1.

Conference Proceedings
Conference Proceedings
1. Dry Etch Challenges in Gate All Around Devices for sub 32 nm Applications
S. Barnola ; C. Vizioz ; N. Vulliet ; C. Dupré ; T. Ernst
Pub. info.: SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices.  pp.923-934,  2008.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 16(10)
2.

Conference Proceedings
Conference Proceedings
2. High dose Implantation Impact on the Carrier Mobility in Ultra-Thin Unstrained and Strained SOI Films
C. Dupre ; P. Fazzini ; T. Ernst ; F. Cristiano ; J. Hartmann ; A. Claverie ; F. Andrieu ; O. Faynot ; P. Rivallin ; F. Laugier ; G. Ghibaudo ; S. Cristoloveanu ; S. Deleonibus
Pub. info.: Silicon-on-insulator technology and devices 13.  pp.33-38,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 6(4)
3.

Technical Paper
Technical Paper
3. Surface Accuracy Prediction and Optimization of a High Precision Q/V-Band Reflector
M. Lang ; H. Baier ; T. Ernst
Pub. info.: AIAA meeting papers on disc.  2006.  [Reston, Va.].  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference
Ser. no.: 2006
4.

Conference Proceedings
Conference Proceedings
4. Growth and Thermal Stability of SiGe/Si Superlattices on Bulk Si Wafers
J. Hartmann ; A. Papon ; J. Colonna ; T. Ernst ; T. Billon
Pub. info.: SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices.  pp.341-351,  2008.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 16(10)
5.

Conference Proceedings
Conference Proceedings
5. Measurement of the thermal deformation of a highly stable antenna with pulse ESPI
E. Noesekabel ; T. Ernst ; W. Haefker
Pub. info.: Optical Measurement Systems for Industrial Inspection V.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6616