A. Jouve ; J. Simon ; J. Foucher ; T. David ; J.-H. Tortai ; Harun Solak
Pub. info.:
Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA. pp.720-731, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
BioMEMS and nanotechnology III : 5-7 December 2007, Canberra, Australia. pp.67990Y-1-67990Y-10, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering