Draper, C.W. ; Anyanwu, V.E. ; Eisenberg, J.H. ; Felton, G.J. ; Roy, P.K. ; Chittipeddi, S. ; Bechtold, P.F. ; Hagner, G. ; Cooper, D. ; Syverson, D. ; Witowski, B. ; Van Eck, B. ; Gordon, M.
Pub. info.:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.392-400, 1994. Pennington, NJ. Electrochemical Society
Bohannon, B. ; Witowski, B. ; Barnett, J. ; Syverson, D.
Pub. info.:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.362-373, 1994. Pennington, NJ. Electrochemical Society