1.

Conference Proceedings
Conference Proceedings
1. Formation and Characterization of the Ni(Pt)Si and NiSi for MOS Devices Applications
Santos, R.E. ; Doi, I. ; Diniz, J.A. ; Swan, J.W. ; dos Santos Filho, S.G.
Pub. info.: Microelectronics technology and devices : SBMICRO 2002 : proceedings of the seventeenth international symposium.  pp.109-116,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-8
2.

Conference Proceedings
Conference Proceedings
2. Wet Anisotropic Etching Characterization of Crystalline Silicon for Suspended Micro- Mechanical Structure Manufacture
Neli, R.R. ; Doi, I. ; Diniz, J.A. ; Swan, J.W.
Pub. info.: Microelectronics technology and devices : SBMICRO 2002 : proceedings of the seventeenth international symposium.  pp.157-166,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-8
3.

Conference Proceedings
Conference Proceedings
3. Locos Isolation Made by Silicon Nitride ECR Plasma Deposition at Room Temperature
Pereira, M.A. ; Diniz, J.A. ; Doi, I. ; Swan, J.W.
Pub. info.: Microelectronics technology and devices : SBMICRO 2002 : proceedings of the seventeenth international symposium.  pp.373-380,  2002.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-8