1.

Conference Proceedings
Conference Proceedings
1. Critical States of Stress Evolution in Silicon Structures of ULSI with Shallow Trench Isolation
Peidous, I.V. ; Balasubramanian, N. ; Johnson, E. ; Gan, C.H. ; Sundaresan, R.
Pub. info.: ULSI process integration : proceedings of the first international symposium.  pp.243-254,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-18
2.

Conference Proceedings
Conference Proceedings
2. Derivation of Defect Formation History from Dislocation Distribution in Locally Oxidized Silicon Structures
Peidous, I.V. ; Gan, C.H. ; Sundaresan, R. ; Lahiri, S.K.
Pub. info.: Proceedings of the Fifth International Symposium on High Purity Silicon V.  pp.272-281,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-13
3.

Conference Proceedings
Conference Proceedings
3. Gate Oxide Thinning in MOS Structures with Shallow Trench Isolation
Balasubramanian, N. ; Johnson, E. ; Perera, C. ; Mian, C.-S. ; Sheng, T.-T. ; Peidous, I.V. ; Ping, C. ; Cuthbertson, A. ; Sundaresan, R.
Pub. info.: The physics and chemistry of SiO2 and the Si-SiO2 interface-4, 2000 : proceedings of the fourth International Symposium on the Physics and Chemistry of SiO2 and the Si-SiO2 Interface, Tronto, Canada, May 15-18, 2000.  pp.125-130,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-2
4.

Conference Proceedings
Conference Proceedings
4. COMPARATIVE STUDIES OF FURNACE AND RAPID THERMAL PASSIVATION FOR ACCUMULATION AND INVERSION MODE POLYSILICON-ON-OXIDE MOSFETS
Batra, S. ; Park, K. ; Banerjee, S. ; Sundaresan, R.
Pub. info.: Polysilicon thin films and interfaces.  pp.393-398,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 182
5.

Conference Proceedings
Conference Proceedings
5. THERMAL STABILITY OF SPUTTER DEPOSITED TANTALUM SILICIDE FILMS
Dixit, G. A. ; Sundaresan, R. ; Chen, F. S. ; Lin, Y. S. ; Wei, C. C. ; Liou, F. T.
Pub. info.: Materials reliability issues in microelectronics : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.237-246,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 225
6.

Conference Proceedings
Conference Proceedings
6. TEM CHARACTERIZATION OF SOLID-PHASE EPITAXY IN AMORPHIZED POLYSILICON
Chang, P.-H ; Sundaresan, R.
Pub. info.: Materials issues in amorphous-semiconductor technology : symposium held April 15-18, 1986, Palo Alto, California, U.S.A..  pp.71-76,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 70
7.

Conference Proceedings
Conference Proceedings
7. Impact of Silicon Wafer Material on Dislocation Generation in Local Oxidation
Peidous, I. V. ; Sundaresan, R. ; Quek, E. ; Leung, Y. K. ; Beh, M.
Pub. info.: Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.125-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 532
8.

Conference Proceedings
Conference Proceedings
8. Edge Effects of Nitride Film Patterning on Dislocation Generation in Local Oxidation of Silicon
Peidous, I. V. ; Sundaresan, R. ; Quek, E. ; Lau, C. K.
Pub. info.: Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.269-,  1998.  Warrendale, Pa.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 510
9.

Conference Proceedings
Conference Proceedings
9. Charge Pumping Characterization of TFTs: The Effect of Hydrogen Annealing
Balasinski, A. ; Sundaresan, R. ; Hodges, R. ; Bryant, F. ; Huang, K.W. ; Worley, J. ; Liou, F.T.
Pub. info.: Proceedings of the Second Symposium on Thin Film Transistor Technologies.  pp.219-227,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-35
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Conference Proceedings
Conference Proceedings
10. * PROCESS AND DEVICE CONSIDERATIONS FOR SMALL GRAIN POLYSILICON TRANSISTORS
Shichijo, H. ; Malhi, S.D.S. ; Sundaresan, R. ; Banerjee, S.K. ; Lam, H.W.
Pub. info.: Semiconductor-on-insulator and thin film transistor technology : symposium held December 3-6, 1985, Boston, Massachusetts, U.S.A..  pp.419-428,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 53