Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia. pp.356-363, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Infrared technology and applications XXVI : 30 July - 3 August 2000, San Diego, USA. pp.816-822, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering