Search records | 東京工業大学附属図書館文献データベース

You can search for articles included in proceedings of international conferences and technical papers which Tokyo Tech Library holds.
Tokyo Tech members can obtain tables of contents of 17,000 foreign journals by SwetScan. Tokyo Tech Library does not cover all of them.
List of Searchable Databases

Clear Form

Search for other sites by same keyword(s).

CiNii Books

NDL Search

WebcatPlus

amazon

カーリル

WorldCat

Filter

Title:

Author:

ISBN / ISSN / Paper No:

Source Title:

Publisher:

Publication Year:

～

Clear Form

Type:

Conference Proceedings

Technical Paper

Academic Journal

Select: Check all | Remove all

Sort order

10 | 50 | 100 / Per Page

23 results

Conference Proceedings

1. Elementary Reaction Simulation of Al-CVD Using Dimethyl Aluminum Hydride

Sugiyama, M. ; Nakajima, T. ; Tanaka, T. ; Itoh, H. ; Aoyama, J. ; Egashira, Y. ; Yamashita, K. ; Komiyama, H. ; Shimogaki, Y.

Pub. info.:	Interconnect and contact metallization for ULSI : proceedings of the international symposium. pp.56-67, 1999. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-31

Conference Proceedings

2. Two-Dimensional Simulation of the Growth Enhancement in Selective Area Metal-Organic Vapor Phase Epitaxy

Mishima, Y. ; Kaida, N. ; Sugiyama, M. ; Shimogaki, Y. ; Nakano, Y.

Pub. info.:	Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis. pp.364-369, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-23

Conference Proceedings

3. Simplified Modeling of ECR-RIBE Reactor for the Optimization of GaAs Etching Process with C12

Shimogaki, Y. ; Sugiyama, M. ; Nishioka, K. ; Nezuka, M. ; Nakano, Y. ; Tada, K. ; Komiyama, N.

Pub. info.:	Proceedings of the eleventh International Symposium on Plasma Processing. pp.83-88, 1996. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	96-12

Conference Proceedings

4. Predictive Model Extraction from Commercial Scale Poly-Silicon LPCVD Reactor

Shimizo, R. ; Ogino, M. ; Sugiyama, M. ; Shimogaki, Y.

Pub. info.:	Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium. pp.194-201, 2003. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-8

Conference Proceedings

5. Reaction Chemistry of InGaAsP MOCVD Studied with FTIR Gas Monitoring and Numerical Analysis on Growth Kinetics

Sugiyama, M. ; Shimogaki, Y. ; Sudo, S. ; Nakano, Y. ; Sugawara, K. ; Tada, K. ; Komiyama, H.

Pub. info.:	Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.909-916, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-25

Conference Proceedings

6. Surface Analysis of Al Film Prepared from Dimethyl-Aluminum-Hydride

Sugiyama, M. ; Ogawa, H. ; Itoh, H. ; Aoyama, J. ; Horiike, Y. ; Komiyama, H. ; Shimogaki, Y.

Pub. info.:	CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition. pp.489-496, 2000. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-13

Conference Proceedings

7. Experimental and Numerical Study of InGaAsP Materials Growth Kinetics and Composition

Feron, O. ; Sugiyama, M. ; Nakano, Y. ; Shimogaki, Y.

Pub. info.:	CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition. pp.707-714, 2000. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-13

Conference Proceedings

8. Fabrication of Group III-Nitride Waveguides by Inductively Coupled Plasma Etching

Li, N. ; Waki, I. ; Kumtornkittikul, C. ; Liang, J.-H. ; Sugiyama, M. ; Shimogaki, Y. ; Nakano, Y.

Pub. info.:	State-of-the-art program on compound semiconductors XLI and nitride and wide bandgap semiconductors for sensors, photonics, and electronics V : proceedings of the international symposia. pp.270-275, 2004. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2004-06

Conference Proceedings

9. Preparation and Properties of Ferroelectric Bi2SrTa2O9 Thin Films for FeRAM Using Flash-MOCVD

Ami, T. ; Hironaka, K. ; Isobe, C. ; Nagel, N. ; Sugiyama, M. ; Ikeda, Y. ; Watanabe, K. ; Machida, A. ; Miura, K. ; Tanaka, M.

Pub. info.:	Metal-organic chemical vapor deposition of electronic ceramics II : symposium held on November 27-29 1995, Boston, Massachusetts, U.S.A.. pp.195-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	415

10.

Conference Proceedings

10. Development of deNOx Catalyst Based on Ag/Al2O3 Catalyst for Diesel Applications

Nagashima, K. ; Nagata, M. ; Katoh, K. ; Soda, K. ; Sugiyama, M.

Pub. info.:	Science and technology in catalysis 2002 : proceedings of the Fourth Tokyo Conference on Advanced Catalytic Science and Technology, Tokyo, July 14-19, 2002. pp.457-458, 2003. Amsterdam. Elsevier
Title of ser.:	Studies in surface science and catalysis
Ser. no.:	145

23 results

Select: Check all | Remove all

Sort order

10 | 50 | 100 / Per Page

Filtering by:

Author: Sugiyama, M.