1.

Conference Proceedings
Conference Proceedings
1. CLEANING PROCEDURES FOR UHV CLUSTER-TOOL MOS FABRICATION
Sofield, C.J. ; Murrell, M.P. ; Sugden, S. ; Heyns, M. ; Verhaverbecke, S. ; Welland, M.E. ; Golan, B. ; Barnes, J.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.105-112,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
2.

Conference Proceedings
Conference Proceedings
2. Structural and Compositional Study of Si1-xGex Multilayer Structures Using Medium Energy Ion Scattering
Hucknall, P. K. ; Sugden, S. ; Sofield, C. J. ; Noakes, T. C. Q. ; McConville, C. F.
Pub. info.: Strained layer epitaxy - materials processing and device applications : symposium held April 17-19, 1995, San Francisco, California, U.S.A..  pp.229-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 379