1.

Conference Proceedings
Conference Proceedings
1. Real-Time Spectroscopic Ellipsometry Study of the Thermal Cleaning Process for Silicon Epitaxial Growth by UHV-CVD
Nozawa, K. ; Katayama, K. ; Kanzawa, Y. ; Sugahara, G. ; Saitoh, T. ; Kubo, M.
Pub. info.: In situ process diagnostics and modelling : symposium held April 6-7, 1999, San Francisco, California, U.S.A..  pp.83-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 569
2.

Conference Proceedings
Conference Proceedings
2. IRRADIATION EFFECTS OF Ar-CLUSTER ION BEAMS ON Si SURFACES
Takaoka, G. H. ; Sugahara, G. ; Hummel, R. E. ; Northby, J. A. ; Sosnowski, M. ; Yamada, I.
Pub. info.: Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.1005-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 316