1.

Conference Proceedings
Conference Proceedings
1. Trends in SiGe BiCMOS Process Integration
Harame, D. ; Subbanna, S. ; Dunn, J. ; St Onge, S.A. ; Freeman, G. ; Malinowski, J. ; Groves, R. ; Joseph, A. ; Ahlgren, D. ; Johnson, R. ; Zierak, M. ; Coolbaugh, D.
Pub. info.: ULSI process integration : proceedings of the first international symposium.  pp.143-146,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-18
2.

Conference Proceedings
Conference Proceedings
2. INVITED: SILICON-GERMANIUM PROCESS TECHNOLOGY
Subbanna, S. ; Ahlgren, D. ; Harame, D. ; Meyerson, B.S.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.1406-1417,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
3.

Conference Proceedings
Conference Proceedings
3. Toward rf System-Level Integration: Process Integration Issues in SiGe BiCMOS
Freeman, G. ; Schonenberg, K. ; Ahlgren, D. ; Jeng, S-J. ; Nguyen-Ngoc, D. ; Stein, K. ; Colavito, D. ; Subbanna, S. ; Harame, D. ; Meyerson, B.
Pub. info.: Epitaxy and applications of si-based heterostructures : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.19-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 533