Stupik, Paul D. ; Cheatham, Linda K. ; Graha, John J. ; Barron, Andrew R. Barron
Pub. info.:
Chemical vapor deposition of refractory metals and ceramics : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.363-368, 1990. Pittsburgh, Pa.. Materials Research Society
Healy, Mattew D. ; Laibinis, Paul E. ; Stupik, Paul D. ; Barron, Andrew R.
Pub. info.:
Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.83-90, 1989. Pittsburgh, Pa.. Materials Research Society