1.

Conference Proceedings
Conference Proceedings
1. The Influence of Capping Layer Type on Cobalt Salicide Formation in Films and Narrow Lines
Besser, P. R. ; Lauwers, A. ; Roelandts, N. ; Maex, K. ; Blum, W. ; Alvis, R. ; Stucchi, M. ; Potter, M De
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.375-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
2.

Conference Proceedings
Conference Proceedings
2. Processing Damage and Electrical Performance of Porous Dielectrics in Narrow Spaced Interconnects
Iacopi, F. ; Travaly, Y. ; Stucchi, M. ; Struyf, H. ; Peeters, S. ; Jonckheere, R. ; Leunissen, L.H.A. ; Tokei, Zs. ; Sutcliffe, V. ; Richard, O. ; Hove, M.Van ; Maex, K.
Pub. info.: Materials, technology and reliability for advanced interconnects and low-k dielectrics - 2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.19-24,  2004.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 812
3.

Conference Proceedings
Conference Proceedings
3. Curing Study Of Hydrogen Silsesquioxane Under H2N2 Ambient
Donaton, R.A. ; Coenegrachts, B. ; Sleeckx, E. ; Schaekers, M. ; Sophie, G. ; Matsuki, N. ; Baklanov, M.R. ; Struyf, H. ; Lepage, M. ; Vanhaelemeersch, S. ; Beyer, G. ; Stucchi, M. ; De Roest, D. ; Maex, K.
Pub. info.: Materials, technology and reliability for advanced interconnects and low-k dielectrics : symposium held April 23-27, 2000, San Francisco, California, U.S.A..  pp.D5.12-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 612