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15 results

Conference Proceedings

1. Use of light scatter signals to identify particle material

Stover,J.C. ; Ivakhnenko,V.I. ; Eremin,Y.A.

Pub. info.:	Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA. pp.131-139, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4449

Conference Proceedings

2. Effects of particle shape on particle identification and scatter predictions

Ivakhnenko,V.I. ; Stover,J.C. ; Scheer,C.A. ; Eremin,Y.A.

Pub. info.:	Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA. pp.140-146, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4449

Conference Proceedings

3. Accurate sizing of deposited PSL spheres from light scatter measurements

Stover,J.C. ; Scheer,C.A.

Pub. info.:	Optical metrology roadmap for the semiconductor, optical, and data storage industries II : 2-3 August 2001 San Diego, USA. pp.147-150, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4449

Conference Proceedings

4. Modeling of scatter from small pits of arbitrary shape

Ivakhnenko,V.I. ; Scheer,C.A. ; Stover,J.C.

Pub. info.:	Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California. pp.112-121, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3275

Conference Proceedings

5. Round robin determination of power spectral densities of different Si wafer surfaces

Marx,E. ; Malik,I.J. ; Strausser,Y.E. ; Bristow,T.C. ; Poduje,N.S. ; Stover,J.C.

Pub. info.:	Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California. pp.26-36, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3275

Conference Proceedings

6. Comparison of models and measurements of scatter from surface-bound particles

Scheer,C.A. ; Stover,J.C. ; Ivakhnenko,V.I.

Pub. info.:	Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California. pp.102-111, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3275

Conference Proceedings

7. Comparison of surface PSOs calculated from both AFM profiles and scatter data

Stover,J.C. ; Ivakhnenko,V.I. ; Scheer,C.A.

Pub. info.:	Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California. pp.37-46, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3275

Conference Proceedings

8. Calibration requirements for identifying and sizing wafer defects by scanner measurements

Stover,J.C. ; Scheer,C.A.

Pub. info.:	Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA. pp.42-47, 2000. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4099

Conference Proceedings

9. Characterization of Si-on-insulator buried surfaces by FTIR and scatterometry

Yakovlev,V.A. ; Bosch-Charpenay,S. ; Rosenthal,P.A. ; Solomon,P.R. ; Xu,J. ; Stover,J.C. ; Anc,M.J. ; Alles,M.L.

Pub. info.:	Optical diagnostic methods for inorganic transmissive materials II : 3-4 August 2000, San Diego, USA. pp.90-97, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4103

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Conference Proceedings

10. Measurement of scatter from PSL standard spheres deposited on disk surfaces

Scheer,C.A. ; Stover,J.C.

Pub. info.:	Surface characterization for computer disks, wafers, and flat panel displays : 28 January 1999, San Jose, California. pp.72-79, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3619

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Author: Stover,J.C.