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Conference Proceedings

1. Recent advances in a molecular level lithography simulation

Schmid,G.M. ; Singh,V.K. ; Flanagin,L.W. ; Stewart,M.D. ; Burns,S.D. ; Willson,C.G.

Pub. info.:	Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA. Part2 pp.675-685, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3999

Conference Proceedings

2. Study of acid transport using IR spectroscopy and SEM

Stewart,M.D. ; Somervell,M.H. ; Tran,H.V. ; Postnikov,S.V. ; Willson,C.G.

Pub. info.:	Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA. Part2 pp.665-674, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3999

Conference Proceedings

3. Mechanistic understanding of line-end shortening

Stewart,M.D. ; Schmid,G.M. ; Postnikov,S.V. ; Willson,C.G.

Pub. info.:	Advances in Resist Technology and Processing XVIII. 4345 pp.10-18, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4345