1.

Conference Proceedings
Conference Proceedings
1. INTERFACE REACTIONS DURING OXYGEN PLASMA ASSISTED CHEMICAL VAPOR DEPOSITION OF YTTRIUM OXIDE ON SILICON
Niu, D. ; Asheraft, R.W. ; Stemmer, S. ; Parsons, U.N.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.429-439,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
2.

Conference Proceedings
Conference Proceedings
2. Investigations of the Structure and Stability of Alternative Gate Dielectrics
Stemmer, S. ; Chen, Z.Q. ; Lysaght, P.S. ; Gisby, J.A. ; Taylor, J.R.
Pub. info.: Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium.  pp.119-130,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-2
3.

Conference Proceedings
Conference Proceedings
3. Atomic scale structure-property relationships of defects and interfaces in novel oxide thin films
Stemmer, S.
Pub. info.: Superconducting and related oxides : physics and nanoengineering V : 8-11 July, 2002, Seattle, Washington, USA.  pp.244-251,  2002.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4811
4.

Conference Proceedings
Conference Proceedings
4. Integration Issues with High k Gate Stacks*
Osburn, C.M. ; Han, S.K. ; Kim, I. ; Campbell, S.A. ; Garfunkel, E. ; Gustafson, T. ; Hauser, J. ; King, T.-J. ; Liu, Q. ; Ranade, P. ; Kingon, A. ; Kwong, D.-L. ; Lee, S.J. ; Lee, C.H. ; Lee, J. ; Onishi, K. ; Kang, C.S. ; Choi, R. ; Cho, H. ; Nich, R. ; Lucovsky, G. ; Hong, J.G. ; Ma, T.P. ; Zhu, W. ; Luo, Z. ; Maria, J.P. ; Wicaksana, D. ; Misra, V. ; Lee, J.J. ; Suh, Y.S. ; Parksons, G. ; Niu, D. ; Stemmer, S.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.375-390,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-6
5.

Conference Proceedings
Conference Proceedings
5. Transmission-Electron-Microscopy (TEM) Studies of Interfaces in TiB2-ZrO2 Composites
Stemmer, S. ; Vleugels, J. ; Biest, O. Van Der
Pub. info.: Interfacial engineering for optimized properties : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A..  pp.133-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 458
6.

Conference Proceedings
Conference Proceedings
6. Polycrystalline Silicon Films for Microelectromechanical Devices
Kahn, H. ; Stemmer, S. ; Mullen, R. L. ; Huff, M. A. ; Heuer, A. H.
Pub. info.: Polycrystalline thin films II : structure, properties, and applications : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.321-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 403
7.

Conference Proceedings
Conference Proceedings
7. Ferroelectric and piezoelectric properties of MOCVD Pb(Mg1/3Nb2/3) O3-PbTiO3 epitaxial thin films
Baumann, P. K. ; Bai, G. R. ; Steiffer, S. K. ; Auciello, O. ; Ghosh, K. ; Stemmer, S. ; Munkholm, A. ; Thompson, Carol ; Kim, D-J. ; Maria, J-P. ; Kingon, A. I.
Pub. info.: Ferroelectric thin films VIII : symposium held November 29-December 2, 1999, Boston, Massachusetts, U.S.A..  pp.517-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 596
8.

Conference Proceedings
Conference Proceedings
8. Analysis of the Atomic Scale Defect Chemistry in Oxygen Deficient Materials by STEM
Browning, N. D. ; Ito, Y. ; Klie, R. F. ; Mazanec, T. J. ; Sane, A. ; Stemmer, S.
Pub. info.: Advances in materials problem solving with the electron microscope : symposium held November 30-December 3, 1999, Boston, Massachusetts, U.S.A..  pp.69-74,  2001.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 589
9.

Conference Proceedings
Conference Proceedings
9. Investigating Atomic Scale Phenomena at Materials Interfaces With Correlated Techniques in STEM/TEM
Arslan, I. ; Browning, N. D. ; James, E. M. ; Kishida, K. ; Nicholls, A. W. ; Stemmer, S. ; Xin, Y.
Pub. info.: Advances in materials problem solving with the electron microscope : symposium held November 30-December 3, 1999, Boston, Massachusetts, U.S.A..  pp.311-322,  2001.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 589
10.

Conference Proceedings
Conference Proceedings
10. INTERFACE REACTIONS DURING OXYGEN PLASMA ASSISTED CHEMICAL VAPOR DEPOSITION OF YTTRIUM OXIDE ON SILICON
Niu, D. ; Asheraft, R.W. ; Stemmer, S. ; Parsons, U.N.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.429-439,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2