1.

Conference Proceedings
Conference Proceedings
1. MECHANISM OF DRY ETCHING OF SILICON DIOXIDE: A CASE OF DIRECT REACTIVE ION ETCHING
Steinbruchel, Ch. ; Lehmann, H. W. ; Frick, K.
Pub. info.: Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A..  pp.157-162,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 38
2.

Conference Proceedings
Conference Proceedings
2. THE IMPORTANCE OF SELF-SPUTTERING BY LOW ENERGY IONS IN PARTIALLY IONIZED BEAM DEPOSITION
Bai, P. ; Steinbruchel, Ch. ; Lu, T.-M.
Pub. info.: Beam-solid interactions : physical phenomena : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.55-60,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 157
3.

Conference Proceedings
Conference Proceedings
3. UNIVERSAL ENERGY DEPENDENCE OF SPUTTERING YIELDS AT LOW ION ENERGY
Muri, J. ; Steinbruchel, Ch.
Pub. info.: Low energy ion beam and plasma modification of materials : symposium held April 30-May 2, 1991, Anaheim, California, U.S.A..  pp.41-46,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 223
4.

Conference Proceedings
Conference Proceedings
4. REACTIVE ION ETCHING OF COPPER WITH SiCl4 AND CCl2F2
Howard, B.J. ; Wolterman, S.K. ; Yoo, W.J. ; Gittleman, B. ; Steinbruchel, Ch.
Pub. info.: Surface chemistry and beam-solid interactions : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A..  pp.129-134,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 201