1.

Conference Proceedings
Conference Proceedings
1. PHYSICAL AND CHEMICAL SPUTTERING AT VERY LOW ION ENERGY: THE IMPORTANCE OF THE SPUTTERING THRESHOLD
Steinbruchel, C.
Pub. info.: Laser and particle-beam chemical processes on surfaces : symposium held November 29-December 2, 1988, Boston, Massachusetts, U.S.A..  pp.477-482,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 129
2.

Conference Proceedings
Conference Proceedings
2. The Nucleation and Growth of Electrochemically Deposited Copper on PVD Copper and TiN using Alkaline (EDTA and NH 3) Baths
Graham, L. ; Steinbruchel, C. ; Duquette , D.J. ; Chen, L.
Pub. info.: Fundamental aspects of electrochemical deposition and dissolution : proceedings of the international symposium.  pp.27-37,  1999.  Pennington, New Jersey.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-33
3.

Conference Proceedings
Conference Proceedings
3. Ion Beam Techniques for Low-K Materials Characterization
Bakhru, H. ; Kumar, A. ; Kaplan, T. ; Delarosa, M. ; Fortin, J. ; Yang, G.-R. ; Lu, T.-M. ; Kim, S. ; Steinbruchel, C. ; Tang, X. ; Moore, J. A. ; Wang, B. ; McDonald, J. ; Nitta, S. ; Pisupatti, V. ; Jain, A. ; Wayner, P. ; Plawsky, J. ; Gill, W. ; Jin, C.
Pub. info.: Low-dielectric constant materials IV : symposium held April 14-16, 1998, San Francisco, California, U.S.A..  pp.125-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 511
4.

Conference Proceedings
Conference Proceedings
4. Fabrication of Dual-Damascene Structures in Low Dielectric Constant Polymers for Multilevel Interconnects
Tacito, R. ; Steinbruchel, C.
Pub. info.: Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A..  pp.449-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 427