1.

Conference Proceedings
Conference Proceedings
1. Applications of a grating shearing interferometer at 157 nm
Schreiber,H. ; Dewa,P.G. ; Dunn,M.M. ; Hordin,R. ; Mack,S.K. ; Statt,B.D. ; Tompkins,P.J.
Pub. info.: Optical Microlithography XIV.  4346  pp.1095-1106,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
2.

Conference Proceedings
Conference Proceedings
2. 157-nm Twyman-Green interferometer for lens testing
Statt,B.D. ; Dewa,P.G. ; Mack,S.K. ; Schreiber,H. ; Stone,B.D. ; Tompkins,P.J.
Pub. info.: Optical Microlithography XIV.  4346  pp.1107-1114,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346