1.

Conference Proceedings
Conference Proceedings
1. Plasma CVD of Si/C/N: Experimental and Theoretical Results
Berger, C. ; Broszeit, E. ; Falk, F. ; Hoche, H. ; Kroke, E. ; Kroll, P. ; Probst, D. ; Riedel, R. ; Stafast, H. ; Uhlitzsh, V. ; Zhou, Y.
Pub. info.: Chemical vapor deposition XVI and EUROCVD 14 : proceedings of the international symposium.  pp.646-652,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-8
2.

Conference Proceedings
Conference Proceedings
2. Plasma-enhanced CVD of hard SiCN thin films using bistrimethyl silylcarbodiimide or hexamethyl disilazane as single source precursors
Stelzner, Th. ; Folk, F. ; Stafast, H. ; Probst, D. ; Hoche, H.
Pub. info.: EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium.  pp.1014-1020,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-09
3.

Conference Proceedings
Conference Proceedings
3. Pulsed Laser Deposition of Oriented Aluminum Nitride Thin Films and Their Application
Meinschien, J. ; Falk, F. ; Stafast, H.
Pub. info.: Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999.  pp.1523-1526,  2000.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 338-342(2)
4.

Conference Proceedings
Conference Proceedings
4. In-Situ-Gas Phase Analysis during Silicon Thin Film Deposition: Molecular Beam Sampling, Laser Ionization and Mass Spectrometry
Stafast, H. ; Falk, F. ; Witkowicz, E.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.191-198,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13