1.

Conference Proceedings
Conference Proceedings
1. Surface Roughness of Silicon Diaphragm Due to Ionic Contamination During Electrochemical Etching of Silicon
Sooriakumar, K. ; Pastirik, E.M. ; Chan, W.K. ; Schade, M.R.
Pub. info.: Proceedings of the Third International Symposium on Microstructures and Microfabricated Systems.  pp.64-71,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-5
2.

Conference Proceedings
Conference Proceedings
2. Evaluation of Deep Etching Techniques for Silicon Micromachined Pressure Sensor
Sooriakumar, K. ; Chan, W.K.
Pub. info.: Proceedings of the Third International Symposium on Microstructures and Microfabricated Systems.  pp.131-143,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-5
3.

Conference Proceedings
Conference Proceedings
3. A Comparative Study of Wet vs. Dry Isotropic Etch to Strengthen Silicon Micromachined Pressure Sensor
Sooriakumar, K. ; Chan, Wendy ; Savage, Timothy S. ; Fugate, Carol
Pub. info.: Proceedings of the Second International Symposium on Microstructures and Microfabricated Systems.  pp.259-265,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-27
4.

Conference Proceedings
Conference Proceedings
4. Batch Fabrication of Media Isolated Absolute Pressure Sensors
Sooriakumar, K. ; Monk, David J. ; Chan, Wendy ; Vanhoy, Greg ; Goldman, Ken
Pub. info.: Proceedings of the Second International Symposium on Microstructures and Microfabricated Systems.  pp.231-238,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-27
5.

Conference Proceedings
Conference Proceedings
5. An Investigation of Corner Rounding to Strengthen Silicon Micromachined Pressure Sensor for Fusion-Bonded Wafers
Chan, W. ; Sooriakumar, K. ; Bartholomew, K. ; Savage, T.S. ; Vanhoy, T.
Pub. info.: Proceedings of the Third International Symposium on Semiconductor Wafer Bonding : physics and applications.  pp.528-534,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-7
6.

Technical Paper
Technical Paper
6. An Integrated Silicon Bulk Micromachined Barometric Pressure Sensor for Engine Control Unit and External Mount
Sooriakumar, K. ; Verma, Rajan ; Maudie, Theresa ; Shah, Mahesh
Pub. info.: 1997 SAE International Congress and Exposition : technical paper.  pp.67-73,  1997.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 1997
7.

Technical Paper
Technical Paper
7. A Monolithic Integrated Solution for MAP Applications
Verma, Rajan ; Baskett, Ira ; Shah, Mahesh ; Maudie, Theresa ; Mladenovic, Dragan ; Sooriakumar, K.
Pub. info.: 1997 SAE International Congress and Exposition : technical paper.  pp.51-57,  1997.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 1997