1.

Conference Proceedings
Conference Proceedings
1. Is it possible to improve MEEF?
Oh, S.-H. ; Kim, H.-K. ; Kim, D.-J. ; Kim, Y.-S. ; Suh, C.-S. ; Koh, Y.-S. ; Song, C.-L.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1383-1391,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
2.

Conference Proceedings
Conference Proceedings
2. Optical characterization of defects on patterned wafers: exploring light polarization
Lee, B.H. ; Chin, S.-B. ; Cho, D.H. ; Song, C.-L. ; Yeo, J.-H. ; Some, D. ; Reinhorn, S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.849-858,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375