1.

Conference Proceedings
Conference Proceedings
1. Resist development status for immersion lithography
Jouve, A. ; Simon, J. ; Foucher, J. ; David, T. ; Tortai, J.-H. ; Solak, H.
Pub. info.: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.102-108,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5753(1)
2.

Conference Proceedings
Conference Proceedings
2. X-ray Photoemission Spectromicroscopy of GaN and AlGaN
Lorusso, G. F. ; Solak, H. ; Cerrina, F. ; Underwood, J. H. ; Batson, P. J. ; Kim, Y. ; Cho, Y. ; Kisielowski, C. ; Krueger, J. ; Weber, E. R.
Pub. info.: Wide-bandgap semiconductors for high power, high frequency, and high temperature : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.393-,  1998.  Warrendale, Penn..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 512
3.

Conference Proceedings
Conference Proceedings
3. Synchrotron radiation X-ray microdiffraction study of Cu interconnects
Zhang, X. ; Solak, H. ; Cerrina, F. ; Lai, B. ; Cai, Z. ; Ilinski, P. ; Legnini, D. ; Rodrigues, W.
Pub. info.: Applications of synchrotron radiation techniques to materials science V : sympoisum held November 29-December 3, 1999, Boston, Massachusetts, U.S.A..  pp.259-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 590
4.

Conference Proceedings
Conference Proceedings
4. MAXIMUM AT ALS: A Powerful Tool to Investigate Open Problems in Micro- and Optoelectronics
Lorusso, G. F. ; Solak, H. ; Singh, S. ; Batson, P. J. ; Underwood, J. H. ; Cerrina, F.
Pub. info.: Applications of synchrotron radiation techniques to materials science IV : sympoisum held April 13-17, 1998, San Francisco, California, U.S.A..  pp.215-,  1998.  Warrendale, Penn..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 524
5.

Conference Proceedings
Conference Proceedings
5. CHARACTERIZATION OF CLEAVED GaAs(110) WITH A SCANNING PHOTOEMISSION MICROSCOPE CAPABLE OF SUBMICRON RESOLUTION
Ray-Chaudhuri, A. K. ; Ng, W. ; Liang, S. ; Singh, S. ; Solak, H. ; Cerrina, F.
Pub. info.: Applications of synchrotron radiation techniques to materials science : symposium held April 12-15, 1993, San Francisco, California, U.S.A..  pp.255-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 307
6.

Conference Proceedings
Conference Proceedings
6. Overcoming pattern collapse on e-beam and EUV lithography [6153-155]
Jouve, A. ; Simon, J. ; Pikon, A. ; Solak, H. ; Vannuffel, C. ; Tortai, J.-H
Pub. info.: Advances in Resist Technology and Processing XXIII.  pp.61531C-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6153