1.

Conference Proceedings
Conference Proceedings
1. CD variation sources of photomask
Kim,B.G. ; Choi,S.W. ; Yu,Y.H. ; Yoon,H.S. ; Sohn,J.M.
Pub. info.: Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan.  pp.42-52,  1997.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3096
2.

Conference Proceedings
Conference Proceedings
2. Parameters affecting megasonic power transmittance in the megasonic cleaning process
Kim,Y.H. ; Park,J.H. ; Lee,K.H. ; Choi,S.W. ; Yoon,H.S. ; Sohn,J.M.
Pub. info.: Photomask and X-Ray Mask Technology V.  pp.455-462,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3412
3.

Conference Proceedings
Conference Proceedings
3. Mask technology for 0.18-ｦﾌm device generation
Sohn,J.M. ; Choi,S.W. ; Kim,B.G. ; Cho,H.K. ; Yoon,H.S.
Pub. info.: Photomask and X-Ray Mask Technology III.  pp.2-11,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2793
4.

Conference Proceedings
Conference Proceedings
4. Resolution enhancement with thin Cr for chrome mask making
Cha,B.C. ; Choi,S.W. ; Kim,J.M. ; Cho,H.J. ; Sohn,J.M.
Pub. info.: Photomask and X-Ray Mask Technology III.  pp.53-61,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2793
5.

Conference Proceedings
Conference Proceedings
5. FIB repair of opaque defects for 64-Mb-DRAM-level binary masks
Lee,K.H. ; Cho,H.K. ; Park,J.H. ; Kim,Y.H. ; Yoon,H.S. ; Sohn,J.M.
Pub. info.: 16th Annual BACUS Symposium on Photomask Technology and Management.  pp.442-453,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2884