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5 results

1.

Conference Proceedings

1. CD variation sources of photomask

Kim,B.G. ; Choi,S.W. ; Yu,Y.H. ; Yoon,H.S. ; Sohn,J.M.

Pub. info.:	Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan. pp.42-52, 1997. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3096

2.

Conference Proceedings

2. Parameters affecting megasonic power transmittance in the megasonic cleaning process

Kim,Y.H. ; Park,J.H. ; Lee,K.H. ; Choi,S.W. ; Yoon,H.S. ; Sohn,J.M.

Pub. info.:	Photomask and X-Ray Mask Technology V. pp.455-462, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3412

3.

Conference Proceedings

3. Mask technology for 0.18-ｦﾌm device generation

Sohn,J.M. ; Choi,S.W. ; Kim,B.G. ; Cho,H.K. ; Yoon,H.S.

Pub. info.:	Photomask and X-Ray Mask Technology III. pp.2-11, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2793

4.

Conference Proceedings

4. Resolution enhancement with thin Cr for chrome mask making

Cha,B.C. ; Choi,S.W. ; Kim,J.M. ; Cho,H.J. ; Sohn,J.M.

Pub. info.:	Photomask and X-Ray Mask Technology III. pp.53-61, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2793

5.

Conference Proceedings

5. FIB repair of opaque defects for 64-Mb-DRAM-level binary masks

Lee,K.H. ; Cho,H.K. ; Park,J.H. ; Kim,Y.H. ; Yoon,H.S. ; Sohn,J.M.

Pub. info.:	16th Annual BACUS Symposium on Photomask Technology and Management. pp.442-453, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2884

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