1.

Conference Proceedings
Conference Proceedings
1. Fabrication of diffractive optical elements with grayscale photo-lithography
Kim, W. -C. ; Lee, M. ; Sohn, J. ; Cho, E. ; Yoon, C. ; Park, N. ; Park, Y.
Pub. info.: Optical data storage 2004 : 18-21 April 2004, Monterey, California, USA.  pp.686-696,  2004.  Bellingham.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5380
2.

Conference Proceedings
Conference Proceedings
2. Characterizing the response of an EUV reticle during electrostatic chucking [6281-10]
Engelstand, L. R. ; Lovell, G. E. ; Mikkelson,, R. A. ; Nataraju, M. ; Ramaswamy, V. ; Sohn, J. ; Dicks, A. G. ; Abdo, Y. A. ; Tejeda, O. R.
Pub. info.: EMLC 2006 : 22nd European Mask and Lithography Conference : 23-26 January 2006, Dresden, Germany.  pp.628107-628107,  2006.  Bellingham, Wash.,.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6281
3.

Conference Proceedings
Conference Proceedings
3. Process Design for Environmentally and Economically Sustainable Dairy Plant
Sohn, J. ; Reklaitis, G.V. ; Okos, M. R.
Pub. info.: AIChE ANNUAL MEETING - NOVEMBER 16-21, 1997 - LOS ANGELES, CA.  1997.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1997
4.

Conference Proceedings
Conference Proceedings
4. Hybrid integrated optical receivers for high-speed data transmission (Invited Paper)
Leich, M. ; Hurm, V. ; Berger, J. ; Dietrich, E. ; Sohn, J. ; Leuther, A. ; Bronner, W. ; Koehler, K. ; Loesch, R. ; Walcher, H. ; Rosenzweig, J. ; Schlechtweg, M.
Pub. info.: Active and passive optical components for WDM communications III : 8-11 September, 2003, Orlando, Florida, USA.  pp.422-433,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5246
5.

Conference Proceedings
Conference Proceedings
5. The Effects of Extra- and Intracolumn Dispersion on Wave Spreading in Nonlinear Chromatography Systems
Berninger, J. A. ; Sohn, J. ; Miramonte, J. ; Wang, N.-H. L.
Pub. info.: AIChE ANNUAL MEETING -NOVEMBER 1-6, 1992 -MIAMI BEACH, FL.  1992.  New York.  American Institute of Chemical Engineers
Title of ser.: AIChE meeting [papers]
Ser. no.: 1992
6.

Conference Proceedings
Conference Proceedings
6. Experimental verification of finite element model prediction of EUVL mask flatness during electrostatic chucking [6349-124]
Nataraju, M. ; Sohn, J. ; Mikkelson, A. R. ; Turner, K. T. ; Engelstad, R. L. ; Van Peski, C. K.
Pub. info.: Photomask Technology 2006.  pp.634939-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
7.

Conference Proceedings
Conference Proceedings
7. Measuring force uniformity in electrostatic chucking of EUVL masks [6349-126]
Sohn, J. ; Veerarghavan, S. ; Turner, K. T. ; Engelstad, R. L. ; Van Peski, C. K.
Pub. info.: Photomask Technology 2006.  pp.63493B-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
8.

Conference Proceedings
Conference Proceedings
8. Triphenyl amine-cored multibranched organic glasses for photonic applications
Park, S.Y. ; Lee, H.J. ; Sohn, J. ; Hwang, J. ; Choi, H. ; Cha, M.
Pub. info.: Organic Photonic Materials and Devices V.  pp.478-481,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4991
9.

Conference Proceedings
Conference Proceedings
9. Electrostatic chucking and EUVL mask flatness analysis [5992-128]
Nataraju, M. ; Mikkelson, A. ; Sohn, J. ; Engelstad, R. L. ; Lovell, E. G.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59923S-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
10.

Conference Proceedings
Conference Proceedings
10. Modeling LEEPL mask fabrication processes
Azkorra, X. ; Mikkelson, A.R. ; Engelstad, R.L. ; Lovell, E.G. ; Chang, J. ; Sohn, J. ; Nataraju, M. ; Eguchi, H.
Pub. info.: Emerging Lithographic Technologies VIII.  pp.1068-1079,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5374