1.

Conference Proceedings
Conference Proceedings
1. Modeling of transmittance degradation caused by optical surface contamination by atomic oxygen reaction with adsorbed silicones
Snyder,A. ; Banks,B.A. ; Miller,S.K. ; Stueber,T. ; Sechkar,E.
Pub. info.: Optical systems contamination and degradation II : effects, measurements, and control : 2-3 August 2000, San Diego, USA.  pp.157-168,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4096
2.

Conference Proceedings
Conference Proceedings
2. New approach to phase metrology for manufacturing 248-nm lithography-based embedded attenuated phase-shifting mask
Dao,G.T. ; Liu,G. ; Snyder,A. ; Farnsworth,J.N.
Pub. info.: Photomask and X-Ray Mask Technology III.  pp.359-370,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2793