1.

Conference Proceedings

Conference Proceedings
Mani,S.S. ; Fleming,J.G. ; Sniegowski,J.J.
Pub. info.: Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California.  pp.150-157,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3874
2.

Conference Proceedings

Conference Proceedings
Limary,S. ; Stewart,H. ; Irwin,L.W. ; McBrayer,J. ; Sniegowski,J.J. ; Montague,S. ; Smith,J.H. ; Boer,M.P.de ; Jakubczak,J.F.
Pub. info.: Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California.  pp.102-112,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3874
3.

Conference Proceedings

Conference Proceedings
Smith,J.H. ; Montague,S. ; Sniegowski,J.J. ; Murray,J.R. ; Manginell,R.P. ; McWhorter,P.J. ; Huber,R.J.
Pub. info.: Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas.  pp.306-314,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2879
4.

Conference Proceedings

Conference Proceedings
Cresswell,M.W. ; Sniegowski,J.J. ; Ghoshtagore,R.N. ; Allen,R.A. ; Linholm,L.W. ; Villarrubia,J.S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography X.  pp.659-676,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2725
5.

Conference Proceedings

Conference Proceedings
Barron,C.C. ; Fleming,J.G. ; Montague,S. ; Sniegowski,J.J. ; Hetherington,D.L.
Pub. info.: Smart structures and materials 1996 : Smart electronics and MEMS : 28-29 January, 1996, San Diego, California.  pp.30-35,  1996.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2722
6.

Conference Proceedings

Conference Proceedings
Miller,S.L. ; Sniegowski,J.J. ; LaVigne,G. ; McWhorter,P.J.
Pub. info.: Smart structures and materials 1996 : Smart electronics and MEMS : 28-29 January, 1996, San Diego, California.  pp.197-204,  1996.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2722
7.

Conference Proceedings

Conference Proceedings
Smith,B.K. ; Brown,C.D. ; LaVigne,G. ; Sniegowski,J.J.
Pub. info.: Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California.  pp.114-124,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3511
8.

Conference Proceedings

Conference Proceedings
Sniegowski,J.J.
Pub. info.: Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas.  pp.104-115,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2879
9.

Conference Proceedings

Conference Proceedings
Smith,J.H. ; Montague,S. ; Sniegowski,J.J.
Pub. info.: Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas.  pp.64-73,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2639
10.

Conference Proceedings

Conference Proceedings
Rodgers,m.S. ; Sniegowski,J.J. ; Miller,S.L. ; Craig Barron,C. ; McWhorter,P.J.
Pub. info.: Micromachined Devices and Components III.  pp.120-130,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3224