1.

Conference Proceedings
Conference Proceedings
1. Chemical Mechanical Polishing: An Enabling Fabrication Process for Surface Micromachining Technologies
Sniegowski, Jeffry J.
Pub. info.: Proceedings of the International Symposium on Microstructures and Microfabricated Systems IV.  pp.1-11,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-14
2.

Conference Proceedings
Conference Proceedings
2. Improved polysilicon surface-micromachined micromirror devices using chemical-mechanical polishing
Hetherington, Dale L. ; Sniegowski, Jeffry J.
Pub. info.: Photonics for space environments VI : 22 July 1998, San Diego, California.  pp.148-153,  1998.  Bellingham, Wash..  SPIE
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3440