1.

Conference Proceedings
Conference Proceedings
1. Production of SCALPEL masks in a commercial mask facility
Newport,C.L. ; Parker,J. ; Smith,K.M. ; Benveniste,A. ; Kim,N.-W. ; Reyland,D. ; Farrow,R.C. ; Novembre,A.E. ; Kasica,R.J. ; Knurek,C.S. ; Peabody,M.L. ; Rutberg,L.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.162-170,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
2.

Conference Proceedings
Conference Proceedings
2. Defect levels and inhomogeneities of high-purity high-resistivity GaAs films grown by vapor phase epitaxy
Kazukauskas,V. ; Kuprusevicius,E. ; Vaitkus,J.V. ; Smith,K.M. ; Nenonen,S.A. ; Owens,A.
Pub. info.: Smart optical inorganic structures and devices : 16-19 August 2000, Vilnius, Lithuania.  pp.151-156,  2000.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4318
3.

Conference Proceedings
Conference Proceedings
3. Alpha-particle-induced luminescence from multiple quantum wells
Kundrotas,J.K. ; Dargys,A. ; Granja,S.C. ; Kohler,K. ; Pospisil,S. ; Remeikis,V. ; Smith,K.M.
Pub. info.: Smart optical inorganic structures and devices : 16-19 August 2000, Vilnius, Lithuania.  pp.174-179,  2000.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4318