1.

Conference Proceedings
Conference Proceedings
1. SILICON CONSUMPTION DURING SELF-ALIGNED TITANIUM SILICIDE FORMATION ON SHALLOW JUNCTIONS
Smith, P.L. ; Osburn, C.M. ; Wen, D.S. ; McGuire, G.
Pub. info.: Layered structures : heteroepitaxy, superlattices, strain, and metastability : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.299-306,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 160
2.

Conference Proceedings
Conference Proceedings
2. ION IMPLANTATION INDUCED EFFECTS AT POLYSILICON GATE FEATURE EDGES
Stinson, M.G. ; Smith, P.L. ; Osburn, C.M.
Pub. info.: Beam-solid interactions : physical phenomena : symposium held November 27-December 1, 1989, Boston, Massachusetts, U.S.A..  pp.733-738,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 157
3.

Conference Proceedings
Conference Proceedings
3. FORMATION MECHANISM OF EPITAXIAL CoSi2 FILMS ON (001) Si USING Ti-Co BIMETALLIC LAYER SOURCE MATERIALS
Hsia, S.L. ; Tan, T.Y. ; Smith, P.L. ; McGuire, G.E.
Pub. info.: Evolution of surface and thin film microstructure : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.603-608,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 280