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12 results

Conference Proceedings

1. How to describe polarization influence on imaging (Invited Paper)

Smith, B. W. ; Bourov, A. ; Fan, Y. ; Cropanese, F. ; Hammond, P.

Pub. info.:	Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.23-37, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5754

Conference Proceedings

2. Impact of New Screw Inspection Procedures on Productivity

目次はDivisionごとに分けて掲載されている。論文の順番はDivisionにかかわらず，Session順の通しページになっている。

Pub. info.:	Back to the future : conference proceedings : ANTEC 1992, Detroit, May 3-7. pp.2169-2174, 1992. Brookfield Center, CT. Society of Plastics Engineers, Inc. (SPE)
Title of ser.:	Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.:	38

Conference Proceedings

3. ILSim: a compact simulation tool for interferometric lithography

Fan, Y. ; Bourov, A. ; Zavyalova, L. ; Zhou, J. ; Estroff, A. ; Lafferty, N. ; Smith, B. W.

Pub. info.:	Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.1805-1817, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5754

Conference Proceedings

4. Synthetic defocus in interferometric lithography

Cropanese, F. C. ; Bourov, A. ; Fan, Y. ; Zhou, J. ; Zavyalova, L. ; Smith, B. W.

Pub. info.:	Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.1769-1779, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5754

Conference Proceedings

5. Photoresist modulation curves

Bourov, A. ; Fan, Y. ; Cropanese, F. C. ; Smith, B. W.

Pub. info.:	Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.1762-1768, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5754

Conference Proceedings

6. Automated aberration extraction using phase wheel targets

Zavyalova, L. ; Bourov, A. ; Smith, B. W.

Pub. info.:	Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA. pp.1728-1737, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5754

Conference Proceedings

7. Evanescent wave imaging in optical lithography [6154-10]

Smith, B. W. ; Fan, Y. ; Zhou, J. ; Lafferty, N. ; Estroff, A.

Pub. info.:	Optical Microlithography XIX. pp.61540A-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6154

Conference Proceedings

8. Comparison of immersion lithography from projection and interferometric exposure tools [6154-179]

Robertson, S. A. ; Leonard, J. M. ; Smith, B. W. ; Bourov, A.

Pub. info.:	Optical Microlithography XIX. pp.61544N-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6154

Conference Proceedings

9. Three-dimensional imaging of 30-nm nanospheres using immersion interferometric lithography [6154-178]

Zhou, J. ; Fan, Y. ; Smith, B. W.

Pub. info.:	Optical Microlithography XIX. pp.61544M-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6154

10.

Conference Proceedings

10. Experimental measurement of photoresist modulation curves [6154-113]

Bourov, A. ; Robertson, S. A. ; Smith, B. W. ; Slocum, M.

Pub. info.:	Optical Microlithography XIX. pp.61542Z-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6154

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Author: Smith, B. W.