Boer, M. P. de ; Clews, P. J. ; Smith, B. K. ; Michalske, T. A.
Pub. info.:
Microelectromechanical structures for materials research : symposium held April 15-16, 1998 , San Francisco, California, U.S.A.. pp.131-, 1998. Warrendale, Pa.. MRS - Materials Research Society