1.

Conference Proceedings
Conference Proceedings
1. USING OZIDATION TO STUDY THE REACTION BETWEEN POINT DEFFECTS AND DISLOCATION LOOPS
Meng, H.L. ; Chen, J. ; Robinson, H.G. ; Law, M.E. ; Slinkman, J.A. ; Jones, K.S.
Pub. info.: Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.236-242,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-6
2.

Conference Proceedings
Conference Proceedings
2. Reducing measurement uncertainty drives the use of multiple technologies for supporting metrology
Banke, B. ; Archie, C.N. ; Sendelbach, M. ; Robert, J. ; Slinkman, J.A. ; Kaszuba, P. ; Kontra, R. ; DeVries, M. ; Solecky, E.P.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.133-150,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375