1.

Conference Proceedings
Conference Proceedings
1. PROBING SELECTIVE DEPOSITION OF ALUMINIUM USING IN SITU INFRARED SPECTROSCOPY
Gladfelter, Wayne L. ; Simmonds, Michael G. ; Zazzera, Larry A. ; Evans, John F.
Pub. info.: Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.273-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 334
2.

Conference Proceedings
Conference Proceedings
2. ALUMINUM PARTICLE FORMATION IN THE GAS PHASE OF A LOW PRESSURE CHEMICAL VAPOR DEPOSITION REACTOR USING DIMETHYLETHYLAMINE ALANE (AlH3) AS A PRECURSOR
Simmonds, Michael G. ; Gladfelter, Wayne L. ; Li, Haojiang ; McMurry, Peter H.
Pub. info.: Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A..  pp.317-322,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 282