1.

Conference Proceedings
Conference Proceedings
1. Scatterfield microscopy using back focal plane imaging with an engineered illumination field [6152-19]
Patrick, H. J. ; Attota, R. ; Barnes, B. M. ; Germer, T. A. ; Stocker, M. T. ; Silver, R. M. ; Bishop, M. R.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61520J-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
2.

Conference Proceedings
Conference Proceedings
2. Optical critical dimension measurement and illumination analysis using the through-focus focus metric [6152-20]
Attota, R. ; Silver, R. M. ; Bishop, M. R. ; Dixson, R. G.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61520K-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
3.

Conference Proceedings
Conference Proceedings
3. Imaging simulations of optimized overlay marks with deep sUb-resolution features [6152-114]
Kandel, D. ; Adel, M. E. ; Frommer, A. ; Levinski, V. ; Rapoport, A. ; Silver, R. M.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61522X-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
4.

Conference Proceedings
Conference Proceedings
4. The limits of image-based optical metrology (Invited Paper) [6152-35]
Silver, R. M. ; Barnes, B. M. ; Attota, R. ; Jun, J. ; Filliben, J. ; Soto, J. ; Stocker, M. ; Lipscomb, P. ; Marx, E. ; Patrick, H. J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61520Z-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
5.

Conference Proceedings
Conference Proceedings
5. Calibrating optical overlay measurements [6152-37]
Lipscomb, W. P. III ; Allgair, J. A. ; Bunday, B. D. ; Bishop, M. R. ; Silver, R. M. ; Attota, R. ; Stocker, M. D.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.615211-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152