1.

Conference Proceedings
Conference Proceedings
1. Millisecond Annealing: Past, Present and Future
Paul Timans ; Jeff Gelpey ; Steve McCoy ; Wilfried Lerch ; Silke Paul
Pub. info.: Doping engineering for device fabrication : symposium held April 18-19, 2006, San Francisco, California, U.S.A..  pp.3-14,  2006.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 912
2.

Conference Proceedings
Conference Proceedings
2. Strengths and Limitations of the Vacancy Engineering Approach for the Control of Dopant Diffusion and Activation in Silicon
Alain Claverie ; Fuccio Cristiano ; Mathieu Gavelle ; Fabrice Sévérac ; Frédéric Cayrel ; Daniel Alquier ; Wilfried Lerch ; Silke Paul ; Leonard Rubin ; Vito Raineri ; Filippo Giannazzo ; Hervé Jaouen ; Ardechir Pakfar ; Aomar Halimaoui ; Claude Armand ; Nikolay Cherkashim ; Olivier Marcelot
Pub. info.: Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A..  pp.3-14,  2008.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1070
3.

Conference Proceedings
Conference Proceedings
3. Efficacy of Damage Annealing in Advanced Ultra-Shallow Junction Processing
Paul Timans ; Yao Zhi Hu ; Jeff Gelpey ; Steve McCoy ; Wilfried Lerch ; Silke Paul ; Detlef Bolze ; Hamid Kheyrandish
Pub. info.: Doping engineering for front-end processing : symposium held March 25-27, 2008, San Francisco, California, U.S.A..  pp.155-162,  2008.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1070