1.

Conference Proceedings
Conference Proceedings
1. Evaluation of the Properties of Polyurethane Pads and their Correlation to the Perfonnance in the CMP Process
Zantye, P. ; Sikder, A. ; Kumar, A. ; Belyaev, A. ; Tarasov, I. ; Ostapenko, S.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.182-189,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-21
2.

Conference Proceedings
Conference Proceedings
2. Using carbon nanotube cantilevers in scanning probe metrology
Schlaf, R. ; Emirov, Y. ; Bieber, J.A. ; Sikder, A. ; Kohlscheen, J. ; Walters, D.A. ; Islam, M.R. ; Metha, B. ; Ren, Z.F. ; Shofner, T.L. ; Rossie, B.B. ; Cresswell, M.W.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.53-57,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689